FIELD: materials.
SUBSTANCE: technology for producing high-hardness material of nanodispersed isotope-modified molybdenum boride. Plasma-chemical evaporation of a porous target pressed from nanoparticles of isotope-modified molybdenum is carried out in an atmosphere of boron-containing volatile substance – isotopically enriched boron trichloride mixed with hydrogen in pulsed plasma at a ratio of hydrogen to boron trichloride of at least 3:1 and a pressure of 140 - 200 Torr, and molybdenum boride is deposited onto the substrate.
EFFECT: degree of conversion increase from 10 to 80% per cycle, productivity up to 0.1 g/h, with homogeneity of the phase composition of 99.5 - 99.8% and dispersion of no more than 100 nm.
1 cl, 2 ex
| Title | Year | Author | Number |
|---|---|---|---|
| PLASMA-CHEMICAL METHOD OF PRODUCING BORON CARBIDE | 2016 |
|
RU2648421C2 |
| METHOD OF PRODUCING NANO-SIZED STRUCTURES OF MOLYBDENUM | 2014 |
|
RU2610583C2 |
| METHOD OF PRODUCING ISOTOPICALLY-ENRICHED GERMANIUM | 2011 |
|
RU2483130C1 |
| METHOD OF PRODUCING HIGH-PURITY POLYCRYSTALLINE SILICON | 2018 |
|
RU2739312C2 |
| METHOD OF PRODUCING PHOTOSENSITIVE GALLIUM OXIDE FILMS | 2023 |
|
RU2822007C1 |
| METHOD OF PRODUCING COMPOSITE NANOPOWDER ZrB - SiC | 2023 |
|
RU2821525C1 |
| METHOD OF MAKING BORON-SILICON-CONTAINING NANOPARTICLES | 2011 |
|
RU2460689C1 |
| METHOD OF PRODUCING TITANIUM NITRIDE NANOPOWDERS | 2010 |
|
RU2434716C2 |
| METHOD AND DEVICE TO PRODUCE NANOPOWDERS USING TRANSFORMER PLASMATRON | 2009 |
|
RU2406592C2 |
| METAL COATING OF UPGRADED ADHESION TO MATERIAL OF PAD AND METHOD OF FABRICATION OF THIS COATING | 2007 |
|
RU2358034C2 |
