METHOD FOR COMPARATIVE EVALUATION OF BATCHES OF SEMICONDUCTOR ARTICLES FOR QUALITY AND RELIABILITY Russian patent published in 2024 - IPC G01R31/26 

FIELD: microelectronics.

SUBSTANCE: invention relates to microelectronics, namely to methods of ensuring quality and reliability of semiconductor articles (SCA): diodes, transistors and integrated circuits, and can be used for comparative evaluation of quality and reliability of batches of articles of the same type. Low-frequency noise is measured on identical random samples from batches of articles before and immediately after exposure to a high-frequency electromagnetic field with flux density of not less than 5.9 kW/m². Difference in low-frequency noise level values measured before and immediately after exposure to high-frequency electromagnetic field is calculated. For each sample, an arithmetic mean value of the differences in the level of low-frequency noise of semiconductor articles is calculated. Comparison of arithmetic mean values of low-frequency noise level is used to determine comparative quality and reliability of article batches. Quality and reliability are considered to be lower for that batch of semiconductor articles for which the arithmetic mean value of the change in the noise level is greater.

EFFECT: simplification of the method and increased reliability of evaluation of batches of semiconductor articles by quality and reliability.

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