METHOD FOR COMPARATIVE EVALUATION OF BATCHES OF SEMICONDUCTOR ARTICLES BY RELIABILITY Russian patent published in 2019 - IPC G01R31/26 

FIELD: microelectronics.

SUBSTANCE: invention relates to microelectronics, namely to methods of ensuring quality and reliability of semiconductor products, and can be used for comparative evaluation of quality and reliability of batches of products of the same type both at the stage of production, and at input inspection at manufacturers of radioelectronic equipment. In the method of comparative evaluation of batches of semiconductor articles in terms of reliability on identical samples from batches, information values are measured at room temperature before and after fail-safety tests for 100 hours, then average values of coefficient of increase of informative parameter / parameters for samples are compared.

EFFECT: nondestructive method, which widens the field of use and improves reliability of rejection of semiconductor articles in terms of reliability compared to existing similar methods.

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