METHOD FOR DIAGNOSING BEAM OF CHARGED PARTICLES Russian patent published in 2024 - IPC G01T1/29 

FIELD: measurement.

SUBSTANCE: invention relates to determination of spatial-energy characteristics of a beam. Method for diagnosing a beam of charged particles comprises steps of plotting a characteristic curve of a position-sensitive detector before recording an optical image of the beam, determining the scale of the recorded image, forming a beam of charged particles having given power parameters, simultaneously obtaining a digital image of the intensity of the beam and recording the power of the beam, based on the characteristic curve, linearizing the obtained image and correcting the digital image of the intensity of the beam, determining the beam spatial characteristics: beam focusing distance L_f, minimum beam diameter d_min, average beam diameter d_m, average angle of beam convergence or divergence θ_m; determining beam power density q_2m.

EFFECT: higher efficiency and decreased amount of rejects during processing materials with beams of charged particles.

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