METHOD OF PRODUCING THIN FILMS OF Pb-Ch-Ch TYPE AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2024 - IPC H01L31/18 

FIELD: chemistry.

SUBSTANCE: group of inventions relates to production of ternary systems of lead chalcogenides of Pb-Ch-Ch type, and can be used in production of various sensors and sensors. In the developed method, the lead source is located in the immediate vicinity of the reaction zone, which ensures the ingress of lead into it due to the pressure of its own saturated vapors, and the supply of chalcogenes is carried out in such a way as to exclude the possibility of interaction of lead vapors and chalcogenes to the reaction zone. In the developed devices, the plasma-chemical reactor is made in the form of a horizontally located flowing quartz tube, quartz loading tank for solid lead is located in close proximity to reaction zone and is connected to plasma-chemical reactor by separate heated quartz line.

EFFECT: disclosed method and device for its implementation enable to obtain thin films of ternary lead chalcogenides (Pb-Ch-Ch), having improved structural properties, in one vacuum cycle.

9 cl, 1 dwg