METHOD OF FORMING A CURRENT-CONDUCTING ELEMENT OF AN ELECTRIC CIRCUIT ON A DIELECTRIC SUBSTRATE BY SINGLE-STEP LASER-INDUCED DIRECT TRANSFER OF A SILVER FILM Russian patent published in 2024 - IPC C23C14/28 H01L21/283 

FIELD: physics; microelectronics.

SUBSTANCE: invention relates to physics and microelectronics and can be used to form current-conducting micro- and macroelements of electric circuits on dielectric substrates, which is relevant in the manufacture of solar batteries, sensors, formation of electrical contacts in electronic and optoelectronic devices. To form a current-conducting element of an electric circuit on a dielectric substrate, silver particles forming said circuit element are transferred from a donor substrate, transparent for laser radiation, on the surface of which a silver layer is applied, to said dielectric acceptor substrate as a result of scanning said silver layer with a laser beam and subsequent sintering of said silver particles. Transfer of said silver particles and their subsequent sintering is carried out in one step, by at least two successive laser pulses as a result of scanning the silver film with a laser beam with wavelength of 1,064 nm, a pulse duration of 120 ns, a pulse repetition rate of 20 kHz, when focusing a laser beam with a lens with a focal distance of 160 mm, pulse energy of 0.4 mJ, scanning speed of 1,000 mm/s and a distance between said donor and acceptor substrates of 25 mcm.

EFFECT: invention enables formation of current-conducting elements of electric circuits with high specific conductivity on dielectric substrates with simultaneous simplification of the technological process of their formation and reduction of its duration.

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