METHOD FOR OBTAINING WEAR-RESISTANT AND THERMODYNAMICALLY RESISTANT MULTI-LAYER COATING ON BASIS OF HIGH-MELTING METALS AND THEIR COMPOUNDS Russian patent published in 2011 - IPC C23C14/06 C23C14/35 

FIELD: metallurgy.

SUBSTANCE: to pre-cleaned surface of the substrate there applied are layers of coating by means of magnetron sputtering; at that, first, titanium adhesion layer is applied by magnetron sputtering of titanium target in inert gas; then, titanium nitride TiN layer is applied by sputtering of titanium target in gas mixture of inert and reaction gases; after that, alternating layers of two-component zirconium nitride ZrN are applied by sputtering of zirconium target in gas mixture of inert and reaction gases and zirconium by sputtering of zirconium target in inert gas. Then, alternating layers of three-component titanium and zirconium nitride TiZrN are applied by simultaneous sputtering of titanium and zirconium targets in gas mixture of inert and reaction gases and zirconium by sputtering of zirconium target in inert gas.

EFFECT: mutual location of layers in the coating provides minimum heat stresses at boundaries of layers and it is the most favourable from the point of view of coating material fatigue strength at action of dynamic thermal power loads at operation under conditions of increased temperatures.

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