METHOD FOR NANOSTRUCTURING SURFACE OF DIELECTRIC SUBSTRATE Russian patent published in 2024 - IPC G03F7/20 B82Y40/00 

Abstract RU 2828174 C1

FIELD: technological processes.

SUBSTANCE: invention relates to methods for laser nanostructuring of a surface. Method for nanostructuring the surface of a dielectric substrate according to the invention consists in irradiating a forming system with laser radiation, forming a focused bent electromagnetic beam and irradiating the surface of the substrate with it, wherein the forming system is made in the form of a mesoscale dielectric particle which forms a photonic hook directly on its shadow surface and is placed by its shadow surface on the surface of the dielectric substrate.

EFFECT: invention enables nanostructuring of the surface of a dielectric substrate with formation of a curvilinear crater in the substrate.

1 cl, 2 dwg

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RU 2 828 174 C1

Authors

Minin Igor Vladilenovich

Minin Oleg Vladilenovich

Dates

2024-10-07Published

2024-04-22Filed