METHOD OF PRODUCING TUNGSTEN HEXAFLUORIDE Russian patent published in 2024 - IPC C01G41/04 C23C4/123 C23C16/30 C23C16/44 

FIELD: chemical or physical processes.

SUBSTANCE: invention relates to a method of producing tungsten hexafluoride in gas phase. Fluorination of tungsten is carried out in a vertically oriented reactor. Said reactor provides continuous downward flow of carrier gas and continuous uniform supply of tungsten wire from above inside said reactor into heating area by means of inductor high-frequency electromagnetic field. Then a drop of melted tungsten is formed at the end of the tungsten wire, from which tungsten is evaporated in the high-frequency electromagnetic field of the inductor, and tungsten nanoparticles are condensed. Then, condensed tungsten nanoparticles are carried away from the condensation zone into the reaction zone. Reagent gas in form of fluorine is introduced into said reaction zone, and tungsten nanoparticles react with fluorine to obtain tungsten hexafluoride in gas phase. Obtained tungsten hexafluoride together with the carrier gas flow is directed to the pre-cooling area. Then, tungsten hexafluoride is condensed from the carrier gas flow into cylinders-condensers.

EFFECT: obtaining tungsten hexafluoride in gas phase with purity of not less than 99_99 % in continuous mode.

3 cl, 1 dwg, 3 ex