MILLIMETRE SPECTRUM ELLIPSOMETER Russian patent published in 2025 - IPC G01N21/21 G02B5/30 

FIELD: measuring.

SUBSTANCE: invention relates to measuring equipment and relates to an ellipsometer. Ellipsometer has a polariser arm and an analyser arm. Arm of the polariser consists of a radiation source, a linear polariser oriented at angle of 45° relative to the plane of incidence of radiation on the analysed surface, and a circular polariser providing a phase shift of 90°. Analyser arm has a radiation receiver in the millimetre range and a linearly polarizing filter in front of the radiation receiver, said filter being in the form of a rotatable disc and having four axially symmetrical sectors. Microstructure of sectors is made in form of an array of electrically conductive strips, direction of each strip in sector is oriented at angles +45°, -45°, 90°, 0° with respect to the radius vector drawn from the centre of rotation to the point of intersection with the strip.

EFFECT: high signal-to-noise ratio when measuring intensity of polarized radiation.

1 cl