FIELD: measuring.
SUBSTANCE: invention relates to measurement equipment and relates to a polarization filter for an ellipsometer. Polarizing filter It consists of a disk made with possibility of rotation and containing four axes of symmetrically located sectors. Microstructure of the sectors is made in the form of an array of electroconductive strips, the direction of each strip in the sector is oriented at angles of +45°, -45°, 90°, 0° with respect to the radius vector drawn from the centre of rotation to the point of intersection with the strip. Polarization filter is configured to provide, during continuous rotation, a discrete change in the azimuth of linear polarization of radiation incident on the receiver +45°, -45°, 90°, 0°.
EFFECT: high signal-to-noise ratio when measuring intensity of polarized radiation.
1 cl
Title | Year | Author | Number |
---|---|---|---|
MILLIMETRE SPECTRUM ELLIPSOMETER | 2024 |
|
RU2840127C1 |
METHOD OF MEASURING POLARISATION SENSITIVITY OF OPTICAL RADIATION RECEIVER (VERSIONS) | 2010 |
|
RU2426078C1 |
ELLIPSOMETER | 2007 |
|
RU2351917C1 |
ELLIPSOMETER | 2005 |
|
RU2302623C2 |
ELLIPSOMETRIC SENSOR | 2022 |
|
RU2799977C1 |
ELLIPSOMETRE | 2008 |
|
RU2384835C1 |
ELLIPSOMETER | 0 |
|
SU1695145A1 |
TWO-WAY VELOCITY ELLIPSOMETER | 2020 |
|
RU2749149C1 |
SPECTRAL ELLIPSOMETER | 2003 |
|
RU2247969C1 |
ELLIPSOMETRIC TRANSMITTER | 1999 |
|
RU2157513C1 |
Authors
Dates
2025-04-14—Published
2024-10-31—Filed