POLARIZING FILTER FOR ELLIPSOMETER OF MILLIMETRE RANGE OF SPECTRUM Russian patent published in 2025 - IPC G02B5/30 G01N21/21 

Abstract RU 2838341 C1

FIELD: measuring.

SUBSTANCE: invention relates to measurement equipment and relates to a polarization filter for an ellipsometer. Polarizing filter It consists of a disk made with possibility of rotation and containing four axes of symmetrically located sectors. Microstructure of the sectors is made in the form of an array of electroconductive strips, the direction of each strip in the sector is oriented at angles of +45°, -45°, 90°, 0° with respect to the radius vector drawn from the centre of rotation to the point of intersection with the strip. Polarization filter is configured to provide, during continuous rotation, a discrete change in the azimuth of linear polarization of radiation incident on the receiver +45°, -45°, 90°, 0°.

EFFECT: high signal-to-noise ratio when measuring intensity of polarized radiation.

1 cl

Similar patents RU2838341C1

Title Year Author Number
MILLIMETRE SPECTRUM ELLIPSOMETER 2024
  • Kuznetsov Sergei Aleksandrovich
  • Fedorinin Viktor Nikolaevich
  • Gelfand Aleksandr Vitalevich
  • Kravchenko Iurii Leonidovich
RU2840127C1
METHOD OF MEASURING POLARISATION SENSITIVITY OF OPTICAL RADIATION RECEIVER (VERSIONS) 2010
  • Alekseev Sergej Andreevich
  • Matveev Nikolaj Vadimovich
RU2426078C1
ELLIPSOMETER 2007
  • Spesivtsev Evgenij Vasil'Evich
  • Rykhlitskij Sergej Vladimirovich
  • Borisov Andrej Gennad'Evich
  • Shvets Vasilij Aleksandrovich
RU2351917C1
ELLIPSOMETER 2005
  • Spesivtsev Evgenij Vasil'Evich
  • Rykhlitskij Sergej Vladimirovich
  • Shvets Vasilij Aleksandrovich
RU2302623C2
ELLIPSOMETRIC SENSOR 2022
  • Krylov Petr Nikolaevich
  • Vodenikov Sergei Kronidovich
  • Fedotova Irina Vitalevna
  • Solomennikova Aleksandra Stanislavovna
RU2799977C1
ELLIPSOMETRE 2008
  • Chikichev Sergej Il'Ich
  • Rykhlitskij Sergej Vladimirovich
  • Prokop'Ev Vitalij Jur'Evich
RU2384835C1
ELLIPSOMETER 0
  • Kovalev Vitalij Ivanovich
SU1695145A1
TWO-WAY VELOCITY ELLIPSOMETER 2020
  • Kovalev Vladimir Vitalevich
  • Kovalev Vitalij Ivanovich
  • Kovalev Sergej Vitalevich
RU2749149C1
SPECTRAL ELLIPSOMETER 2003
  • Dulin S.A.
  • Rykhlitskij S.V.
RU2247969C1
ELLIPSOMETRIC TRANSMITTER 1999
  • Fedorinin V.N.
RU2157513C1

RU 2 838 341 C1

Authors

Kuznetsov Sergei Aleksandrovich

Fedorinin Viktor Nikolaevich

Gelfand Aleksandr Vitalevich

Dates

2025-04-14Published

2024-10-31Filed