FIELD: manufacturing of high- quality surfaces. SUBSTANCE: device has cathode, anode, additional hollow ring electrode which has holes for supply of plasma-producing gas, power supply which is connected to cathode and anode, and pulse generator. Additional hollow ring electrode has concave spherical surface which is directed to cathode and which center coincides with center of cathode face. Holes for supply of plasma-producing gas are located on concave spherical surface. Their axes run through center of spherical surface. Adjacent holes have different size, holes which are opposite with respect to cathode axis are equal. Sizes of holes conform to condition of stream gas flow , where U is through-put capacity of holes; ro is radius of holes; l is length of holes; η is dynamic viscosity index for gas; P1 and P2 are values of pressure in chamber of additional electrode and in accelerator (in millimeters of mercury column). EFFECT: increased reliability of discharge generation.
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Authors
Dates
1996-10-20—Published
1982-04-07—Filed