FIELD: physics, measurement equipment.
SUBSTANCE: invention relates to gas analysis and namely to detection devices used to record and measure oxygen traces content. The invention can be used for environmental monitoring. The technical result of the invention is to improve sensitivity and adaptability of sensor manufacturing. The sensor includes a semiconductor base and a substrate. The semiconductor base is made of polycrystalline film of a solid solution of cadmium telluride, reinforced by cadmium selenide with composition (CdSe)0.5(CdTe)0.5, a piezoelectric resonator electrode pad serves as a substrate.
EFFECT: invention with significantly simpler manufacturing techniqe provides several times higher oxygen sensitivity than that of existing sensors.
3 dwg
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