VACUUM COATING DEVICE Russian patent published in 1994 - IPC

FIELD: vacuum treatment of materials. SUBSTANCE: device has substrate holder 1, evaporator 3 mounted opposite to the former, vapor flow generator 4 built up of coaxial truncated cones 5 whose walls 6 form ducts 7 for vapor outlet. Uniform coating is obtained on fixed substrate along with reduced quantity of evaporated coating material is obtained due to coincidence of center line of generator 4 with center of substrate holder 1, convergence of center lines of ducts 7 in circular zone of substrate holder 1 whose radius equals (0.6-0.9)R, where R is radius of substrate holder 1, arrangement of substrate holder 1 at distance L greater than or equal to 2R from generator 4, and 1.1-1.4 times reduction of length of walls 6 of adjacent channels 7 from center to periphery. EFFECT: improved quality of coating, increased utilization factor of coating material. 2 cl, 1 dwg