GALLIUM ARSENIDE INTEGRATED CIRCUIT MANUFACTURING METHOD Russian patent published in 1996 - IPC

Abstract SU 1491262 A1

FIELD: electronic engineering. SUBSTANCE: method for producing monolithic gallium arsenide integrated circuits involves formation of active-region insulation by proton bombardment; photoresist mask is deposited gallium arsenide anodic oxide pre-formed during formation of transistor active channel; during proton bombardment, photoresist mask is used as shielding coat of active regions. EFFECT: increased yield of serviceable products due to improvement of electrical characteristics of transistors. 7 dwg

Similar patents SU1491262A1

Title	Year	Author	Number
SEMICONDUCTOR DEVICE MANUFACTURING PROCESS	1992	Samsonenko B.N. Narnov B.A. Ivanov L.A.	RU2029413C1
METHOD OF MANUFACTURE OF SEMICONDUCTOR DEVICE WITH CONTROLLING ELECTRODE OF SUBMICRON LENGTH	1991	Baranov B.A.	RU2031481C1
METHOD TO MANUFACTURE FIELD TRANSISTORS WITH SELF-ALIGNED GATE OF SUBMICRON LENGTH	2010	Arykov Vadim Stanislavovich Gavrilova Anastasija Mikhajlovna Dedkova Ol'Ga Anatol'Evna Lilenko Jurij Viktorovich	RU2436186C2
METHOD OF MANUFACTURE OF FIELD-EFFECT TRANSISTORS ON THE BASE OF GALLIUM ARSENIDE	0	Vaksenburg Vladimir Yanovich Inozemtsev Gennadij Markovich Korablik Aleksandr Semenovich Polyakov Aleksandr Berkovich	SU1831731A3
SEMICONDUCTOR DEVICE MANUFACTURING PROCESS	1990	Samsonenko B.N. Sorokin I.N. Dzhalilov Z. Pautov A.P.	SU1823715A1
PROCESS OF MANUFACTURE OF SEMICONDUCTOR DEVICES	1992	Samsonenko B.N. Narnov B.A.	RU2031479C1
METHOD OF PRODUCING SEMICONDUCTOR DEVICES	1979	Ajzenshtat G.I. Ignat'Ev M.G. Lipin V.S. Kovjazina T.M.	SU807915A1
METHOD OF MANUFACTURE OF SEMICONDUCTOR DEVICES	1991	Samsonenko B.N. Sorokin I.N. Sigachev A.V. Pautov A.P.	SU1811330A1
METHOD OF FIELD EFFECT TRANSISTOR PRODUCTION WITH SCHOTTKY BARRIER	2007	Romanov Vadim Leonidovich Dragut' Maksim Viktorovich	RU2349987C1
METHOD TO PRODUCE MICROWAVES OF FIELD HIGH POWER PSEUDOMORPHIC TRANSISTOR	2016	Egorov Konstantin Vladilenovich Khodzhaev Valerij Dzhuraevich Sergeev Gennadij Viktorovich Shutko Mikhail Dmitrievich Ivannikova Yuliya Viktorovna	RU2633724C1

SU 1 491 262 A1

Authors

Belokhvostikova L.S.

Dedinets V.E.

Dubrovskaja L.A.

Filatov A.L.

Dates

1996-01-10—Published

1987-05-27—Filed