DEVICE FOR HIGH-TEMPERATURE TREATMENT OF SEMICONDUCTOR STRIPS Russian patent published in 1994 - IPC

Abstract SU 1547619 A1

FIELD: semiconductor engineering. SUBSTANCE: device has horizontal-pipe furnace and crystal holder, strip centering and holding facility, strip compression adjusting unit. Strip centering and holding facility is support carrying set of plane-parallel disks made of semiconductor material and coated with silicon nitride. Movable rod inserted in addition between this facility and strip compression adjusting unit has ball-and-socket joint. Strip compression adjusting unit is mounted beyond furnace pipe. EFFECT: provision for high-temperature thermocompression paired welding of semiconductor strips. 3 cl, 1 dwg

Similar patents SU1547619A1

Title Year Author Number
CONSOLE DEVICE FOR HORIZONTAL CONTACTLESS DRIVING OF SEMICONDUCTOR PLATES IN DIFFUSION FURNACE 2017
  • Perov Gennadij Vasilevich
RU2684335C2
SEMICONDUCTOR STRUCTURE MANUFACTURING METHOD 1999
  • Gromov V.I.
  • Dunin-Barkovskij A.R.
  • Ognev V.V.
RU2197768C2
METHOD FOR DIFFUSION OF DOPING FROM SOLID SOURCE FOR MANUFACTURING SEMICONDUCTOR INSTRUMENTS 1990
  • Denisjuk Vladimir Antonovich[Ua]
  • Bresler Grigorij Isaakovich[Ua]
RU2094901C1
METHOD OF MANUFACTURING SILICON STRUCTURE WITH DIELECTRIC INSULATION 1992
  • Brjukhno N.A.
  • Dolgikh S.I.
  • Dunin-Barkovskij A.R.
  • Ermolaeva A.I.
  • Koshelev N.I.
  • Ognev V.V.
  • Polinskaja R.N.
  • Timoshenkov S.P.
RU2018194C1
METHOD OF MANUFACTURING SOLID SOURCE OF BOROW DIFFUSION 0
  • Pavlenko Yurij Anatolevich
SU1479973A1
METHOD FOR MANUFACTURING SEALING UNIT OF SULFUR-SODIUM STORAGE BATTERY 1992
  • Belousenko A.P.
  • Kuznetsov V.S.
  • Parkhuta M.A.
  • Sergeev A.V.
RU2092936C1
CASSETTE FOR DIFFUSION TREATMENT OF SEMICONDUCTOR WAFERS 2010
  • Zajtsev Igor' Ivanovich
  • Maksimova Valentina Dmitrievna
  • Sejfedinova Rushanija Mansurovna
  • Skachkova Dar'Ja Aleksandrovna
  • Sorokin Jurij Ivanovich
  • Shirokova Marina Valentinovna
  • Skorova Galina Valerianovna
RU2432637C1
HOLDER FOR GROUP DIFFUSION TREATMENT OF SEMICONDUCTOR PLATES 2010
  • Vznuzdaev Evgenij Aleksandrovich
  • Ershova Elena Fedorovna
  • Zyrjanova Svetlana Grigor'Evna
  • Kolesnikov Vjacheslav Alekseevich
  • Korneeva Galina Il'Inichna
  • Korneeva Ol'Ga Nikolaevna
  • Kisljakova Marina Aleksandrovna
  • Lipina Tat'Jana Vladimirovna
RU2408949C1
METHOD FOR DOPING SEMICONDUCTING SILICON WITH PHOSPHORUS TO CREATE P-N JUNCTIONS 2015
RU2612043C1
ROLLER TYPE EXPANDING TOOL FOR DIFFUSION WELDING OF DIFFERENT-KIND LARGE-DIAMETER TUBES 2001
  • Semenov A.N.
  • Tjurin V.N.
  • Shevelev G.N.
RU2182062C1

SU 1 547 619 A1

Authors

Кontsevoj Ju.А.

Еnisherlova-Vel'Jasheva К.L.

Вachurin V.V.

Levin А.В.

Vernikov М.А.

Dates

1994-09-30Published

1987-11-24Filed