CONSOLE DEVICE FOR HORIZONTAL CONTACTLESS DRIVING OF SEMICONDUCTOR PLATES IN DIFFUSION FURNACE Russian patent published in 2019 - IPC F27D3/00 

FIELD: physics.

SUBSTANCE: invention relates to a cantilever device for horizontal non-contact loading of semiconductor plates into a diffusion furnace. Device comprises a tubular cantilever for loading cassettes with semiconductor wafers and a movable in a horizontal direction mechanism for moving the cantilever mounted on one side thereof, at that, the cantilever movement mechanism is made in the form of a platform fixed with the possibility of movement along the horizontal guides made in the form of cylindrical pipes, which are fixed by the cross bar on one side to the vertical posts, and on the other side - to diffusion furnace base, and is equipped with step motor, pusher with separate guide for its movement and hook for engagement with cantilever through hole made in it, wherein console is fixed in suspended state with possibility to control position of cantilever in vertical plane by means of fixed support on one side, movable support on other side, handles and arranged at specified distance from each other composite rings, with which said supports are completed, and in the tubular cantilever on the loading side there is a horizontal cut on 1/4-1/3 of the diameter of the console tube, the size of which corresponds to the length of the cassette with semiconductor plates.

EFFECT: higher reliability of non-contact loading of semiconductor plates into horizontal furnace for heat treatment of plates and pressure leveling of gases flow along working zone due to detachable plug and holes in inoperative part of console.

1 cl, 2 dwg