DEVICE FOR APPLYING COATINGS ON SUBSTRATES IN VACUUM Russian patent published in 2017 - IPC C23C14/35 

FIELD: nanotechnology.

SUBSTANCE: invention relates to the technology of applying nanofilms in a vacuum. The device comprises a vacuum chamber, a magnetron with an annular zone of target erosion and a vacuum input with a dog hook and a platform with substrate holders kinematically connected with a reversible electric drive. The substrate holders are kinematically connected via an axis to the rollers and mounted on the platform with a shift towards the target center relative to the erosion zone parallel to the target surface. The rollers rest on an annular guide, the supporting surface of which has a bevel. In the center of the platform, in the lower part of the axis, a shutter is installed, made in the form of a disk with holes, the size of which is not less than the size of the substrates. In the upper part of the axis, above the platform, there is a dog connected with the dog hook. Stoppers are installed on the platform to enable the flap to turn in opposite directions.

EFFECT: reduced thickness irregularity and improved quality of the films.

2 cl, 2 dwg