Show metadata Hide metadata

(19)

(11)

1 766 210

(13)

(51)

IPC

(21) (22)

Application

4893815/25, 1990-12-25

(22)

Actual filing date

1990-12-25

(45)

Published

1994-04-15

(72)

Inventor

Komov A.N.Dorofeeva L.L.Lenivkina I.V.Lenivkin V.V.Krichevskaja T.P.Stol'Nits M.M.

METHOD OF CHEMICAL DEPOSITION OF SEMICONDUCTOR FILMS FROM CHALCOGENIDES OF METALS Russian patent published in 1994 - IPC

Abstract SU 1766210 A1

FIELD: semiconductor production. SUBSTANCE: semiconductor plates are put into electrolyte containing 2·10³ mol/l Pb(NO₃)₂, tiocarbamide 5·10^-3 mol/l; or selenocarbamide 5·10^-3 mol/l. Electrolyte with substrate is heated with the aid of heater to temperature at which deposition starts. Simultaneously with heating semiconductor plates are exposed to pulse laser radiation on length of wave from region of radiation absorption with molecules of chalogen-containing substance. Length of pulses is 10^-5-10^-7 with frequency 0.1-30 kHz and power density 10⁴-10⁷V/cm². EFFECT: improved efficiency of deposition. 2 tbl

Similar patents SU1766210A1

Title	Year	Author	Number
METHOD FOR PRODUCING PHOTOSENSITIVE CHEMICALLY DEPOSITED FILMS OF LEAD SELENIDE	2015	Maskaeva Larisa Nikolaevna Markov Vyacheslav Filippovich Smirnova Zinaida Igorevna Belousov Dmitrij Andreevich Yurk Viktoriya Mikhajlovna	RU2617350C1
METHOD FOR PRODUCING NANOCRYSTALLINE SILICON/AMORPHOUS HYDROGENATED SILICON HETEROJUNCTION FOR SOLAR ELEMENTS AND SOLAR ELEMENT WITH SUCH HETEROJUNCTION	2016	Kashkarov Pavel Konstantinovich Kazanskij Andrej Georgievich Forsh Pavel Anatolevich Zhigunov Denis Mikhajlovich	RU2667689C2
METHOD FOR INCREASING EFFICIENCY OF DOPING AND CHANGING CONDUCTIVITY TYPE OF AMORPHOUS HYDROGENATED SILICON SLIGHTLY DOPED WITH ACCEPTOR IMPURITIES	2016	Kashkarov Pavel Konstantinovich Kazanskij Andrej Georgievich Forsh Pavel Anatolevich Zhigunov Denis Mikhajlovich	RU2660220C2
METHOD FOR MAKING PbSnSe SUBSTITUTION SOLID SOLUTION FILMS BY ION EXCHANGE PROCESS	2013	Markov Vjacheslav Filippovich Smirnova Zinaida Igorevna Maskaeva Larisa Nikolaevna	RU2552588C1
MANUFACTURING METHOD OF THIN FILMS BASED ON SAMARIUM MONOSULPHIDE	2010	Zenkevich Andrej Vladimirovich Lebedinskij Jurij Jur'Evich Parfenov Oleg Evgen'Evich Storchak Vjacheslav Grigor'Evich Teterin Petr Evgen'Evich	RU2459012C2
METHOD FOR PRODUCTION OF RE-EMITTING TEXTURED THIN FILMS BASED ON AMORPHOUS HYDROGENATED SILICON WITH SILICON NANOCRYSTALS	2015	Kashkarov Pavel Konstantinovich Kazanskij Andrej Georgievich Forsh Pavel Anatolevich Zhigunov Denis Mikhajlovich Emelyanov Andrej Vyacheslavovich	RU2619446C1
METHOD OF PRODUCING PHOTOSENSITIVE LAYERS OF LEAD SELENIDE	2019	Yurk Viktoriya Mikhajlovna Maskaeva Larisa Nikolaevna Markov Vyacheslav Filippovich	RU2745015C2
PROCESS OF PRODUCTION OF CRYSTALLINE BUFFER LAYERS	1991	Veretennikov V.A. Emel'Janenkov D.G. Epikhin V.N. Kuznetsov S.V. Mazaev A.A. Makhov V.I. Semenov O.G.	RU2006996C1
SOLUTION FOR HYDROCHEMICAL PRECIPITATION OF SEMICONDUCTOR FILMS OF INDIUM SELENIDE	2016	Tulenin Stanislav Sergeevich Markov Vyacheslav Filippovich Maskaeva Larisa Nikolaevna Kuznetsov Mikhail Vladimirovich	RU2617168C1
METHOD FOR FORMING A PERIODIC PATTERN ON THE SURFACE OF AMORPHOUS THIN FILMS OF PHASE-VARIABLE CHALCOGENIDE MATERIALS	2022	Smaev Mikhail Petrovich Glukhenkaya Viktoriya Borisovna Lazarenko Petr Ivanovich Budagovskij Ivan Andreevich Kozyukhin Sergej Aleksandrovich	RU2786788C1

SU 1 766 210 A1

Authors

Komov A.N.

Dorofeeva L.L.

Lenivkina I.V.

Lenivkin V.V.

Krichevskaja T.P.

Stol'Nits M.M.

Dates

1994-04-15—Published

1990-12-25—Filed