HOLDER OF SEMICONDUCTOR PLATES FLUID TREATMENT BY CENTRIFUGATION Russian patent published in 1994 - IPC

Abstract RU 2019889 C1

FIELD: electronics. SUBSTANCE: disc surface of holder has sockets to install semiconductor plates and spaces under them. Side of each space nearest by direction of movement of holder is connected with duct to rarefaction unit. Rarefaction unit is manufactured in the form of rectangular hollow over perimeter of disc. Number of rarefaction units matches number of sockets for setting of semiconductor plates. EFFECT: improved quality and efficiency of treatment. 1 dwg

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RU 2 019 889 C1

Authors

Valentinov М.М.

Nedospasov V.G.

Nesterov А.I.

Dates

1994-09-15—Published

1991-06-28—Filed