PROCESS OF MANUFACTURE OF CONVERTER OF SURFACE ACOUSTIC WAVES ON BASE OF PIEZOELECTRIC FILM Russian patent published in 1995 - IPC

Abstract RU 2031489 C1

FIELD: electric devices. SUBSTANCE: film system composed of adhesive layer and aluminium film is deposited in vacuum on surface of substrate. Electrodes of surface acoustic waves converter are formed from film system by method of photolithography. Piezoelectric film, for instance zinc oxide is precipitated on electrodes of converter in vacuum as adhesive layer preventing formation of beads on surface of aluminium film. Yttrium film having thickness not less than 20 nm is used in process. EFFECT: improved efficiency of process.

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RU 2 031 489 C1

Authors

Zima V.N.

Stoletov I.S.

Dates

1995-03-20—Published

1991-03-14—Filed