METHOD OF MAKING SURFACE ACOUSTIC WAVE DEVICES Russian patent published in 2015 - IPC H03H3/08 

FIELD: physics, acoustics.

SUBSTANCE: invention relates to microelectronics and the technology of making surface acoustic wave (SAW) devices. The method of making surface acoustic wave devices includes depositing an aluminium film on a piezoelectric substrate, depositing a film of a valve metal underneath said aluminium film, forming a photoresist mask, electrochemical anodic treatment of aluminium in the gaps between electrodes, removing the formed porous aluminium oxide in a selective chemical etchant, partial conversion by electrochemical anodic treatment of the valve metal film to a valve metal oxide, removing the formed valve metal oxide and the non-anodic treated valve metal film in selective chemical etchants which do have an effect on the aluminium film and the material of the piezoelectric substrate.

EFFECT: making SAW devices with high frequency by preventing formation of non-anodic treated aluminium islands and preventing etching of aluminium electrodes.

6 cl, 2 dwg