MAGNETRON SPRAYING HEAD Russian patent published in 2018 - IPC C23C14/35 

Abstract RU 2656318 C1

FIELD: machine building.

SUBSTANCE: invention relates to a magnetron spray head. Cooled magnetic system of a magnetron spray head consists of magnets and a magnetic circuit and is equipped with cooling channels. Magnetic system is fixed in a curved body. Upper part of the magnetic circuit is conical. Locking device is made in the form of a hollow conductive tube, connected to the body, on which a dielectric holder is mounted externally. Inside the tube there are channels for cooling the magnetic system and a pipeline for supplying electrolyte and gas. Body is equipped with a through channel, which, in its turn, is connected to the pipeline for supplying electrolyte and gas. Outer surface of the body is formed with a fine-grained surface relief from 0.2 to 10 mm. Negative pole of the power supply unit is connected to the locking device, forming a cathode, and positive pole - to the article, forming an anode.

EFFECT: technical result is increased quality of the surface, as well as expanded technological possibilities of processing the article.

1 cl, 2 dwg, 1 tbl

Similar patents RU2656318C1

Title Year Author Number
MAGNETRON 2002
  • Tuleushev Adil Zhianshakhovich
  • Tuleushev Jurij Zhianshakhovich
  • Volodin Valerij Nikolaevich
RU2218450C2
MAGNETRON SPRAYING SYSTEM 2002
  • Zhukov V.V.
  • Krivobokov V.P.
  • Janin S.N.
RU2220226C1
MAGNETRON SPRAYING SYSTEM 2021
  • Trofimov Viktor Nikolaevich
  • Kalandiya Margarita Raminovna
  • Sokolov Andrej Vyacheslavovich
  • Borisov Vladimir Mikhajlovich
  • Yakushkin Aleksej Aleksandrovich
  • Nazarenko Nazar Alekseevich
  • Isakov Artem Olegovich
  • Cherepanova Yustina Vladimirovna
RU2782416C1
DUAL MAGNETRON SPRAY-TYPE SYSTEM 2008
  • Krivobokov Valerij Pavlovich
  • Jur'Eva Alena Viktorovna
  • Jur'Ev Jurij Nikolaevich
  • Janin Sergej Nikolaevich
RU2371514C1
DEVICE FOR HIGH-SPEED MAGNETRON SPUTTERING 2006
  • Chajrev Viktor Ivanovich
  • Choj Dzhun M'En
RU2311492C1
METHOD OF COATING AND DEVICE FOR ITS IMPLEMENTATION 2015
  • Timerkaev Boris Akhunovich
  • Israfilov Danis Irekovich
RU2620534C2
GAS-DISCHARGE SPUTTERING APPARATUS BASED ON PLANAR MAGNETRON WITH ION SOURCE 2020
  • Semenov Aleksandr Petrovich
  • Semenova Irina Aleksandrovna
  • Tsyrenov Dmitrii Badma-Dorzhievich
  • Nikolaev Erdem Olegovich
RU2752334C1
MAGNETRON SPRAYING SYSTEM 1995
  • Krivobokov V.P.
  • Kuz'Min O.S.
  • Legostaev V.N.
RU2107970C1
MAGNETRON TYPE SPRAYING APPARATUS 2004
  • Kuz'Min Oleg Stanislavovich
  • Kositsyn Lev Grigor'Evich
  • Likhachev Vladimir Nikolaevich
RU2280097C2
MAGNETRON SPRAY SYSTEM WITH ELECTRON INJECTION 2015
  • Shandrikov Maksim Valentinovich
  • Oks Efim Mikhajlovich
  • Bugaev Aleksej Sergeevich
  • Vizir Aleksej Vadimovich
  • Ostanin Aleksandr Gennadevich
RU2631553C2

RU 2 656 318 C1

Authors

Popov Aleksandr Innokentevich

Radkevich Mikhail Mikhajlovich

Medko Vladimir Semenovich

Shilling Nikita Georgievich

Rudavin Aleksej Aleksandrovich

Dates

2018-06-04Published

2017-04-04Filed