METHOD OF RECRYSTALLIZATION OF FILMS OF HIGH-MELTING OXIDES Russian patent published in 1995 - IPC

Abstract RU 2032961 C1

FIELD: obtaining insulating layers. SUBSTANCE: sublayer with the film is affected by low-temperature plasma of atmospheric pressure. Power, gas flow rate, and duration of exposure of the sublayer with film to the flow are defined by relationships presented in the invention description. EFFECT: improved quality of films. cl, dwg

Similar patents RU2032961C1

Title	Year	Author	Number
METHOD FOR MANUFACTURING HIGH-TEMPERATURE SUPERCONDUCTIVE THIN FILM BASED ON YTTRIUM	0	Pavlov Georgij Yakovlevich Knyazev Igor Viktorovich Kulik Pavel Pavlovich Samsonov Nikolaj Sergeevich Makhov Vladimir Ilich Inkin Yurij Nikolaevich	SU1823932A3
METHOD FOR NITRIDING TITANIUM OXIDE COATINGS ON A SOLID SUBSTRATE	2021	Butashin Andrej Viktorovich Gadzhiev Makhach Khajrudinovich Muslimov Arsen Emirbegovich Kanevskij Vladimir Mikhajlovich Tyuftyaev Aleksandr Semenovich	RU2775988C1
METHOD FOR NITRATION OF COATINGS OF TITANIUM OXIDE ON SOLID SUBSTRATE	2022	Butashin Andrej Viktorovich Gadzhiev Makhach Khajrudinovich Muslimov Arsen Emirbegovich Kanevskij Vladimir Mikhajlovich Tyuftyaev Aleksandr Semenovich	RU2785576C1
METHOD FOR PRODUCING MULTILAYER OPTICAL COAT ON SUBSTRATE	1992	Kulik P.P. Zorina E.N. Mazan'Ko I.P. Eskin N.I.	RU2035752C1
ABRASIVE MATERIAL FOR PRECISION TREATMENT OF SURFACE AND ITS MANUFACTURING PROCESS	1994	Selifanov Oleg Vladimirovich Tochitskij Ehduard Ivanovich Akulich Valerij Vladimirovich	RU2136483C1
METHOD FOR TREATMENT OF MATERIAL SURFACE TO ENSURE ITS WETTING WITH AQUEOUS SOLUTION	1992	Ivanov V.V. Kulik P.P. Novikov S.N. Pavlov G.Ja. Fomichev A.V.	RU2015747C1
PROCESS OF DYNAMIC PLASMA TREATMENT OF SURFACE OF RIGID BODIES	1990	Zorina E.N. Tsvetkova Ju.V. Eskin N.I. Kononenko V.I. Jaroshenko N.G.	RU2028834C1
METHOD FOR NITRIDING OF OXIDE COMPOUNDS IN A SOLID PHASE	2019	Butashin Andrej Viktorovich Gadzhiev Makhach Khajrudinovich Kanevskij Vladimir Mikhajlovich Muslimov Arsen Emirbegovich Tyuftyaev Aleksandr Semenovich	RU2713008C1
PRODUCTION METHOD OF HIGH-TEMPERATURE SUPERCONDUCTING FILM ON THE QUARTZ SUBSTRATE	2015	Porokhov Nikolaj Vladimirovich Khrykin Dmitrij Aleksandrovich Klenov Nikolaj Viktorovich Maresov Aleksandr Gennadevich Snigirev Oleg Vasilevich Evlashin Stanislav Aleksandrovich	RU2629136C2
METHOD FOR PRODUCING EPITAXIAL GALLIUM OXIDE FILMS ON C-ORIENTED SAPPHIRE	2023	Mochalov Leonid Aleksandrovich Kudryashov Mikhail Aleksandrovich Prokhorov Igor Olegovich Vshivtsev Maksim Anatolevich Slapovskaya Ekaterina Andreevna	RU2812236C1

RU 2 032 961 C1

Authors

Knjazev I.V.

Pavlov G.Ja.

Vybornova L.N.

Dates

1995-04-10—Published

1990-02-27—Filed