FIELD: electric engineering. SUBSTANCE: heater of vacuum chamber 1 has vacuum-arc discharge integral cold electrode 3 and anode 8 which are connected to power supply. In addition heater has tube which is made from non-conducting material which is resistant to heat and unit 5 which does not pass through metal ions. Anode 8 is located in chamber of tube setting piece 7, unit 5 is located between non- attached end of tube and cathode 3. Ratio of cross-sections of setting tube piece 7, tube working piece 6 and working surface of anode is given in invention specification. EFFECT: increased functional capabilities. 1 dwg
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Authors
Dates
1995-08-20—Published
1992-05-25—Filed