FIELD: coatings application on pieces. SUBSTANCE: in technological vacuum chamber gas plasma is created by electrons emitance from metal gas plasma of two-staged vacuum arc discharge with cold cathode. Dispersed target surface is attacked by charged particles of plasma, applying high-voltage negative potential on target and deposit metal ions on piece. In the case, in process of coating application area of gas plasma with maximum density is formed alternatively in zones of different ends of piece. Two electrodes 2, 3 are mounted in vacuum chamber 1. Electrodes are connected with electric power discharge source 9 through commutation mean 15 and target 4, that is connected with negative pole of high-voltage direct current source 10. Mounted in discharge power circuit commutation mean 15 provides alternating connection to any of the same name pole of source 9 of electrodes 2, 3. Another version in zone of dispersed surface of target 4 has additional electrode 23, mounted so as to be capable to be moved. The electrode is connected with positive pole of source 10 through controlled trigger 26. In the version commutation mean 15 provides simultaneous or alternating connection of electrodes 2, 3 to negative pole of source 10 with trigger 26 in make state and their alternating connection to any of the same name pole of source 10 with trigger 26 in break state. EFFECT: method and apparatus are used to deposit coatings on pieces. 7 cl, 3 dwg
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Authors
Dates
1995-06-19—Published
1992-08-10—Filed