METHOD OF SYNTHESIS OF MONOSILANE Russian patent published in 1995 - IPC

FIELD: chemical technology. SUBSTANCE: mixture of silicon tetrafluoride and hydrogen is converted to fluorosilanes by excitement of noncontracted microwave discharge. Fluorosilane mixture is fed into column with sodium fluoride at temperature 280-350 C where conversion of fluorosilanes to monosilane is carried out. Formed mixture is fed into the second column with sodium fluoride at temperature 100-150 C where hydrogen fluoride sorption is performed. Regeneration of sodium fluoride in the first and second columns is carried out at 550-600 C and 450 C, respectively. Product is used in microelectronic industry as raw for production of polycrystalline silicon of high purity. EFFECT: improved method of synthesis. 2 cl