CALIBRATION STANDARD FOR PROFILE METERS AND SCANNING PROBE MICROSCOPES Russian patent published in 2015 - IPC G01Q40/02 

FIELD: physics.

SUBSTANCE: in a calibration standard for profile meters and scanning probe microscopes, consisting of a plate made of polarised piezoelectric material, to the two opposite sides of which an electrode is attached, the electrode being connected to a constant amplitude and polarity voltage source, an element is attached to each side of the plate with the attached electrode, wherein the plate and the geometric dimensions of the elements are selected to enable movement of one of the elements when voltage is applied to the electrodes, each of the elements having at least one flat surface parallel to each other and parallel to the direction of movement of one of the elements when voltage is applied to the electrodes.

EFFECT: invention enables to calibrate probe microscopes and profile meters on one or more horizontal axes lying in the plane of the analysed sample, and widens the range of equipment which can be used as a calibration standard for profile meters and scanning probe microscopes.

2 dwg, 2 ex