CALIBRATION STANDARD FOR PROFILE METERS AND SCANNING PROBE MICROSCOPES Russian patent published in 2015 - IPC G01Q40/02 

FIELD: physics.

SUBSTANCE: in a reference consisting of a plate made of polarised piezoelectric material, to the two opposite sides of which an electrode is attached, the electrode being connected to a constant amplitude and polarity voltage source, an element is attached to each side of the plate with the attached electrode, wherein the plate and the geometric dimensions of the elements are selected to enable movement of one of the elements when voltage is applied to the electrodes. Each of the elements has at least two flat surfaces perpendicular to each other, one of which, for each element, is perpendicular to the direction of movement of one of the elements when voltage is applied to the electrodes, and the other, which is perpendicular to the previous, is parallel for each element.

EFFECT: invention enables to perform three-dimensional calibration of probe microscopes and profile meters and widens the range of equipment which can be used as a calibration standard for profile meters and scanning probe microscopes.

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