GALLIUM ARSENIDE ETCHANT Russian patent published in 1996 - IPC

Abstract RU 2063095 C1

FIELD: microelectronics. SUBSTANCE: gallium arsenide etchant contains in its composition nitric acid (712-1000 g/1), sodium or potassium nitrite (1-20 g/1), and water. EFFECT: provision for producing dull finish of GaAs surface to enlarge external quantum radiation efficiency of light-emitting diodes and adhesion of metal contact layers.

Similar patents RU2063095C1

Title	Year	Author	Number
	0	Vasilenko Nikolaj Dmitrievich Zelenin Yurij Aleksandrovich Krasnov Vasilij Aleksandrovich Kovtun Gennadij Prokofevich Malyshev Valerij Dmitrievich	SU1783594A1
PROCESS OF MANUFACTURE OF SEMICONDUCTOR DEVICE	1992	Ajzenshtat G.I. Sodatenko K.V. Shamova G.I.	RU2031483C1
METHOD TO MANUFACTURE FIELD TRANSISTORS WITH SELF-ALIGNED GATE OF SUBMICRON LENGTH	2010	Arykov Vadim Stanislavovich Gavrilova Anastasija Mikhajlovna Dedkova Ol'Ga Anatol'Evna Lilenko Jurij Viktorovich	RU2436186C2
LIGHT EMITTING DIODE	1992	Dneprovskij S.N. Sergeeva A.A. Vishnjakov A.S.	RU2054210C1
METHOD FOR PREPARING EVEN-ATOM SURFACE OF GALLIUM ARSENIDE	2006	Bezrjadin Nikolaj Nikolaevich Kotov Gennadij Ivanovich Starodubtsev Aleksandr Aleksandrovich Strygin Vladimir Dmitrievich Arsent'Ev Ivan Nikitich	RU2319798C1
METHOD OF GROWING GALLIUM NITRIDE FILM	2014	Tomashpolskij Jurij Jakovlevich Matjuk Vladimir Mikhajlovich Sadovskaja Natalija Vladimirovna	RU2578870C2
METHOD OF MANUFACTURING DIODE WITH TERAHERTZ RANGE WHISKER	2016	Torkhov Nikolaj Anatolevich	RU2635853C2
METHOD TO PRESERVE SURFACE OF SUBSTRATES FROM GALLIUM ARSENIDE	2012	Bezrjadin Nikolaj Nikolaevich Arsent'Ev Ivan Nikitich Kotov Gennadij Ivanovich Kuzubov Sergej Vjacheslavovich Vlasov Jurij Nikolaevich Kortunov Artur Vadimovich	RU2494493C1
METHOD OF MANUFACTURE OF FIELD-EFFECT TRANSISTORS ON THE BASE OF GALLIUM ARSENIDE	0	Vaksenburg Vladimir Yanovich Inozemtsev Gennadij Markovich Korablik Aleksandr Semenovich Polyakov Aleksandr Berkovich	SU1831731A3
METHOD FOR STABILIZATION OF PARAMETERS OF LIGHT-EMITTING DIODES	1981	Tsimberova I.S. Kovalev I.K. Panteleev Ju.K.	RU2034277C1

RU 2 063 095 C1

Authors

Vozmilova L.N.

Maljarova V.G.

Dates

1996-06-27—Published

1993-05-07—Filed