FIELD: instrumentation engineering, production of magnetic carrier (magnetic tape and disks) on nonthermoresistant base. SUBSTANCE: aggregate for ionic-plasma spraying, that has vacuum chamber connected with system of operational gas feeding and located in it planar magnetron sprayer and holder of base, on which target material spraying is exercised, electrodes-grids made in the form of linear arrays with definite space between them are additionally introduced. Arrays are located in direct proximity to base holder, that provides increase of vacuum condensate amorphism degree and coating quality. EFFECT: increased coating quality. 3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| PLANT FOR ION-PLASMA SPRAYING | 1998 |
|
RU2160323C2 |
| METHOD FOR VACUUM ION-PLASMA DEPOSITION OF A THIN FILM OF SOLID ELECTROLYTE | 2021 |
|
RU2765563C1 |
| PLASMA-IMMERSION ION TREATMENT AND DEPOSITION OF COATINGS FROM VAPOUR PHASE WITH HELP OF LOW-PRESSURE ARC DISCHARGE | 2014 |
|
RU2695685C2 |
| MATERIAL FOR METAL-FILM RESISTIVE LAYER AND METHOD FOR PRODUCING A RESISTIVE LAYER ON BASIS OF SAID MATERIAL | 2001 |
|
RU2280905C2 |
| TECHNOLOGY FORMING FILM COAT AND MAGNETRON FACILITY FOR ITS IMPLEMENTATION | 2001 |
|
RU2210619C2 |
| METHOD FOR PRODUCTION OF MAGNETICALLY SOFT HEAT-RESISTANT AMORPHOUS CONDENSATE OF 3D METALS | 1996 |
|
RU2122243C1 |
| METHOD FOR VACUUM-PLASMA DEPOSITION OF A THIN FILM OF LITHIUM PHOSPHORUS OXYNITRIDE | 2022 |
|
RU2793941C1 |
| APPARATUS FOR OBTAINING THIN FILMS BY ION-PLASMA SPRAYING METHOD | 1992 |
|
RU2046840C1 |
| METHOD OF SYNTHESIS OF TiN-Cu COMPOSITE COATINGS AND DEVICE FOR ITS IMPLEMENTATION | 2017 |
|
RU2649355C1 |
| APPARATUS FOR PLASMA SPRAYING OF FILM COATING | 1992 |
|
RU2019576C1 |
