METHOD TO PRODUCE ORIENTED MONOCRYSTALLINE FILMS OF MAGNETIC MATERIALS Russian patent published in 1996 - IPC

FIELD: method to produce oriented monocrystalline films of magnetic materials is used in field of monocrystalline films growing and in production of film magnetic heads and magnetoresistive sensors. SUBSTANCE: method allows to produce monocrystalline films of given orientation on substrate of any orientation or on amorphous one. Method provides for laser spraying in vacuum on substrate in magnetic field, orientation of which makes with direction of spraying angle equal to angle between crystallographic direction of low magnetization and perpendicular to most tightly packed crystallographic plane of film material. Substrate is placed so, that for given orientation of monocrystalline film on substrate crystallographic direction of low magnetization coincides with orientation of magnetic field and most tightly packed crystallographic plane is perpendicular to spraying direction. In the case spraying is carried out under temperature of substrate, that does not exceed Curie point of film material. Monocrystalline film after spraying is subjected to annealing to increase sizes. To increase relative magnetic resistance annealing is carried out in magnetic field oriented along crystallographic axis of low magnetization. EFFECT: method allows to produce monocrystalline film of given orientation on substrate with any orientation or amorphous one.