PROCESS OF MANUFACTURE OF FIELD-EFFECT TRANSISTORS WITH SCOTT GATE MADE OF GALLIUM ARSENIDE Russian patent published in 1996 - IPC

Abstract RU 2068211 C1

FIELD: electronics. SUBSTANCE: invention relates to technology of manufacture of semiconductor devices. Metallization of electrodes (source, drain and gate) is conducted by chemical selective precipitation from solution through photoresistive contact mask. Coating made of amorphous refractory nickel-palladium-phosphorus alloy which is precipitated from nickel- palladium bath at temperature 96-99 C and pH 9.0-10.0 is used as material of gate. EFFECT: facilitated manufacture.

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RU 2 068 211 C1

Authors

Kiparisov S.Ja.

Dates

1996-10-20Published

1992-06-15Filed