FIELD: physics.
SUBSTANCE: in the device for microwave vacuum-plasma treatment of condensed media on carrier tapes, input of microwave energy into the operating chamber, made in form of a rectangular resonator at the generation frequency of the microwave source, is multichannel (distributed). Excitation of microwave oscillations in the resonator is carried out though a rectangular waveguide slanted to a narrow wall, where the waveguide lies along the wide long wall of the resonator, and vacuum-dense dielectric holes for communication with the common wall, arranged in accordance with a defined law, the size of which increases in the direction of propagation of microwave radiation. In the middle of the lateral opposite walls of the operating chamber there are narrow long slits which do not disturb microwave oscillations of the resonator, through which tape of the treated material stretches and connection is made with rolling apparatus.
EFFECT: design of a device for vacuum-plasma treatment of plates of different shapes with any size of the width and length, high density and uniformity of plasma discharge for increasing efficiency and uniformity of micro-treatment of materials on carrier tapes, reduced size of the vacuum apparatus, as well as its weight and cost.
3 cl
