METHOD FOR CONTROLLING THREE-DIMENSIONAL DISTRIBUTION OF PLASMA DENSITY IN MICROWAVE PLASMA SOURCE WITH ELECTRON-CYCLOTRON RESONANCE Russian patent published in 2000 - IPC

Abstract RU 2152663 C1

FIELD: plasma equipment, microelectronics. SUBSTANCE: method involves inducing traveling electromagnetic wave in microwave plasma source with electron-cyclotron resonance in at least two modes with identical azimuthal values, for example, H11 and E11. Then, method involves application of longitudinal permanent magnetic field, which intensity corresponds to electron-cyclotron resonance, and controlling three-dimensional distribution of plasma density by means of alteration of phase difference between said wave modes. EFFECT: increased control range. 1 dwg

Similar patents RU2152663C1

Title	Year	Author	Number
ELECTRON-CYCLONE RESONANCE TUNED DEVICE FOR MICROWAVE VACUUM-PLASMA TREATMENT OF CONDENSED MEDIA	1996	Jafarov Ravil' Kjashshafovich	RU2120681C1
PLANT FOR MICROWAVE VACUUM-PLASMA TREATMENT OF CONDENSED MEDIA	1992	Jafarov Ravil' Kjashshafovich	RU2106716C1
DEVICE FOR MICROWAVE VACUUM-PLASMA TREATMENT OF RIBBON-CARRIED CONDENSED MEDIA USING ELECTRONIC CYCLOTRON RESONANCE	1999	Jafarov R.K.	RU2153733C1
DEVICE FOR MICROWAVE VACUUM-PLASMA TREATMENT OF CONDENSED MEDIA ON CARRIER TAPES	2008	Jafarov Ravil' Kjashshafovich	RU2419915C2
DEVICE FOR MICROWAVE VACUUM-PLASMA SURFACE TREATMENT WITH ELECTRON CYCLOTRON RESONANCE	2002	Koshkin V.V.	RU2223570C1
METHOD FOR MANUFACTURE OF MATRIX OF MULTIPOINT AUTOEMISSIVE CATHODE BASED ON SINGLE-CRYSTAL SILICON	2011	Jafarov Ravil' Kjashshafovich	RU2484548C1
SOURCE OF INTENSE FLOWS OF LOW-TEMPERATURE PLASMA WITH HIGH DEGREE OF IONISATION	2018	Golubev Sergej Vladimirovich Izotov Ivan Vladimirovich Razin Sergej Vladimirovich Sidorov Aleksandr Vasilevich Skalyga Vadim Aleksandrovich Shaposhnikov Roman Anatolevich	RU2695819C1
METHOD AND DEVICE FOR PRODUCING NONEQUILIBRIUM MICROWAVE PLASMA IN HIGH-PRESSURE GASES	1999	Lysov G.V.	RU2166240C2
REACTOR FOR PROCESSING SUBSTRATES IN MICROWAVE GLOW-DISCHARGE PLASMA	1992	Neustroev S.A.	RU2070349C1
APPARATUS, SYSTEM AND METHOD OF GENERATING PARTICLE BEAMS BASED ON ELECTRON CYCLOTRON RESONANCE	2009	Rozental' Glenn B.	RU2526026C2

RU 2 152 663 C1

Authors

Kudrjashov S.A.

Jafarov R.K.

Dates

2000-07-10—Published

1998-09-02—Filed