DEVICE FOR GENERATION OF PLASMA FROM GAS MEDIUM BY MEANS OF ELECTRON-CYCLOTRON RESONANCE (ECR) WITH HIGH RANGE ALONG ONE AXIS Russian patent published in 2018 - IPC H05H1/46 H01J37/32

Abstract RU 2642424 C2

FIELD: electricity.

SUBSTANCE: device contains at least two coaxial wave guides (4), each of which is formed from the central conductor (1) and the external conductor (2) to direct microwave waves in processing camera. At least two electromagnetic waveguides (4) are connected to the magnetic circuit (21-22), elongated in one direction, while the specified magnetic circuit surrounds waveguides, creating a magnetic field that can reach a State of ECR near these waveguides.

EFFECT: increasing the uniformity of plasma directed to the substrate under processing.

9 cl, 1 tbl, 9 dwg

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RU 2 642 424 C2

Authors

Schmidt, Beat

Heau, Christophe

Maurin-Perrier, Philippe

Dates

2018-01-25—Published

2013-09-04—Filed