FIELD: quantum electronics. SUBSTANCE: gas mixture KrF cleaning technique involves the use of cryogenic filter and inert gas cleaning unit. Gas mixture of laser is cleaned in two steps: first, organofluoric impurities and krypton are frozen out of gas mixture by means of cryogenic filter cooled down to 76 K; then cryogenic filter is disconnected from laser chamber, its temperature is risen above 100 K, and filter is connected to inert-gas cleaning unit. EFFECT: improved lifetime of laser gas mixture. 1 dwg
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