VACUUM DEPOSITION APPARATUS Russian patent published in 1997 - IPC

FIELD: vacuum deposition equipment. SUBSTANCE: apparatus has evacuator formed as cubic construction with rigidity ribs, with number of ribs on each wall of evacuator being at least four, ionic source of material to be vacuum deposited, and magnetic system with concentric rectangular magnets arranged so that their like poles are faced one toward the other. Evacuator is mounted in dust-proof housing and may be installed in clean room so that only front panels of evacuator and control system are introduced into working part of room. Apparatus is further provided with vibratory leakage collector positioned adjacent to through opening of high- vacuum pump and cryogenic panels arranged on five sides of construction. Cryogenic panels are provided with openings made on each side of panels. Source of material to be deposited is positioned within cryogenic panel. EFFECT: increased efficiency, simplified construction and improved quality of vacuum deposited material. 7 dwg