ELECTRIC-ARC EVAPORATOR Russian patent published in 1997 - IPC

Abstract RU 2096520 C1

FIELD: vacuum electric-arc evaporators of metals and alloys. SUBSTANCE: set-up in electric-arc evaporator is nonuniform axisymmetric magnetic field having, at least, two maxima, one of which is located on cathode working surface, and the other is located in the plane of anode outlet hole. Located in the region of field of minima, between anode and cathode, are intermediate electrodes covering all lines of straight beam from cathode working surface to anode outlet hole but not crossing the force lines of magnetic field running through working surface of cathode and outlet hole of anode. EFFECT: higher efficiency. 1 dwg

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RU 2 096 520 C1

Authors

Belov Aleksandr Stepanovich

Klenov Viktor Sergeevich

Dates

1997-11-20Published

1996-03-05Filed