FIELD: vacuum electric-arc evaporators of metals and alloys. SUBSTANCE: set-up in electric-arc evaporator is nonuniform axisymmetric magnetic field having, at least, two maxima, one of which is located on cathode working surface, and the other is located in the plane of anode outlet hole. Located in the region of field of minima, between anode and cathode, are intermediate electrodes covering all lines of straight beam from cathode working surface to anode outlet hole but not crossing the force lines of magnetic field running through working surface of cathode and outlet hole of anode. EFFECT: higher efficiency. 1 dwg
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Authors
Dates
1997-11-20—Published
1996-03-05—Filed