OPTOELECTRONIC METHOD OF CHECK OF FORM OF OBJECT Russian patent published in 1997 - IPC

FIELD: measurement technology, instrumentation engineering, precision machine manufacturing to check form of objects of complex configuration with increased precision. SUBSTANCE: optoelectronic method of check of form of object involves illumination of surface of checked object by chosen directions, registration of reflected radiation and determination of form of object by parameters of electric signals with allowance for parameters of electric signals corresponding to radiation reflected from standard surface after it is illuminated. Surface of object of standard form with layers of fouling substance of known thickness is used as standard surface. Length of radiation wave λ_ch used to illuminate standard surface with maximal absorption of radiation by known fouling layer is found by results of check of form of object with standard surface. Corrections determined from dependence of maximal amplitude of electric signals on thickness of fouling layer are calculated. Checked surface is illuminated by wave having length λ_ch and form of checked object is judged with due account of calculated correction. EFFECT: increased precision of optoelectronic method. 1 dwg