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2 450 389

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(51)

IPC

H01L39/24(2006-01-01)

B82B3/00(2006-01-01)

(21) (22)

Application

2011100539/28, 2011-01-11

(24)

Start date

2011-01-11

(22)

Actual filing date

2011-01-11

(45)

Published

2012-05-10

(72)

Inventor

Seropjan Gennadij MikhajlovichSychev Sergej AleksandrovichFedosov Denis Viktorovich

(73)

Holder

Gosudarstvennoe Obrazovatel'Noe Uchrezhdenie Vysshego Professional'Nogo Obrazovanija Gosudarstvennyj Universitet Im. F.M. Dostoevskogo"

METHOD FOR FORMING SMOOTH ULTRATHIN YBCO FILMS WITH HIGH CONDUCTIVITY Russian patent published in 2012 - IPC H01L39/24 B82B3/00

Abstract RU 2450389 C1

FIELD: electricity.

SUBSTANCE: invention is referred to laser evaporation of nanofilms with compound composition of metal oxide YBa₂Cu₃O_7-x (YBCO) and with high conductivity; it can be used for development of nanoelectronic components. Nature of invention implies method for forming smooth ultrathin YBCO films with high conductivity at single-crystal substrate when by laser evaporation of YBa₂Cu₃O_7-xtarget film is formed with thickness of L=5÷7 nm with surface irregularity of ΔL=1÷2 nm and specific resistance of ρ=0.8÷1.1·10^-6 Ohmmetre; target is exposed to laser radiation with power density of P=3·10⁸÷5·10⁸ W/cm², wave length of λ=1.06 mcm, pulse width of τ= 10-20 ns and pulse repetition period of ν=10 Hz within time period of t=7÷10 s at air pressure of p=50÷100 Pa and target temperature of T=600÷700°C and substrate temperature of T=800÷840°C.

EFFECT: invention provides formation of smooth ultrathin YBCO films at single-crystal substrate.

10 dwg

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RU 2 450 389 C1

Authors

Seropjan Gennadij Mikhajlovich

Sychev Sergej Aleksandrovich

Fedosov Denis Viktorovich

Dates

2012-05-10—Published

2011-01-11—Filed