DEVICE FOR PROCESSING DIELECTRIC PRODUCTS WITH FAST ATOMS Russian patent published in 2021 - IPC H01J37/34 H01J27/04 H05H3/00 C23C14/35 

FIELD: electrical engineering.

SUBSTANCE: invention relates to the field of processing dielectric products with accelerated ions or fast atoms and is intended for etching grooves with a high aspect ratio and obtaining products with increased mechanical and electrophysical characteristics of the surface due to the implantation of alloying elements in it. A device for processing products with fast atoms, containing a vacuum chamber, a hollow housing attached to the latter and a discharge power source connected to it by a negative pole, is equipped with an anode installed in the vacuum chamber, connected to the positive pole of the discharge power source, mounted on the hollow housing by a high-voltage voltage input, a set of plane-parallel metal plates installed inside the hollow housing at the boundary with the vacuum chamber and connected electrically to each other and to a high-voltage voltage input, a generator of high-voltage voltage pulses, connected by a positive pole to a vacuum chamber, and a negative pole to a high-voltage voltage input, and a removable flange mounted on the hollow housing, being the holder of the processed products.

EFFECT: greater uniformity in product processing.

1 cl, 1 dwg