FIELD: measurement technology, design of small-sized semiconductor high-sensitive converters of deformation and temperature. SUBSTANCE: integral converter of deformation and temperature has silicon crystal with resistance strain gauges and temperature-sensitive resistor. Temperature-sensitive resistor is placed in plane of resistance strain gauges above hole formed in body of crystal outside resistance strain gauges and is anchored on crystal with the aid of conductive commutation metal wires in the form of flat springs. EFFECT: increased accuracy of measurement of temperature due to exclusion of influence of change of resistance of temperature- sensitive resistor caused by deformation of converter and increased accuracy of measurement of deformations due to temperature compensation. 2 dwg
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