FIELD: ozone treatment methods. SUBSTANCE: invention can be used to prepare ozone-containing gas mixtures; treating (detoxifying) exhausted gases and vapors; pyrolysis of carbon-containing compounds; synthesis of nitrides, oxides, and carbides; converting carbon-containing materials and obtaining fine powders from gas phase; and modifying properties of material surfaces. Initial substances in vapor or gaseous state are transferred into the region of barrier electric discharge and products of plasma chemical reactions are withdrawn from that region. According to invention, by means of dielectric shells, auxiliary zones are isolated in the barrier electric discharge region in series electrically connected with working barrier-discharge zone. Makeup, pressure, and/or temperature of substance or mixture of substances in auxiliary zones (chambers) are specified such as to meet chosen criterion for optimization of carrying out plasma chemical reactions. Electromagnetic emission, emerging upon performing barrier discharge in auxiliary zones, gets into working zone through above-mentioned dielectric shells, which are transparent within electromagnetic frequency ranges satisfying conditions for performing desired plasma chemical reactions in working zone. EFFECT: enabled carrying out plasma chemical reactions following chosen optimization criterion thanks to elevated proportion of acts of desired chemical interactions compared to acts of undesired ones. 2 cl, 18 dwg
