FIELD: measurement technology. SUBSTANCE: device has holder of plate being examined installed on scanning system. One operating pickup which measures size of clearance between itself and surface of examined plate is positioned on each side of plate and on the same axis. In addition device has pickup which determines holder base surface variation in process of examined plate scanning. Plate to be examined is placed on holder, and values of clearances between operating pickups and examined plate are measured many times at different points of plate with the aid of scanning system. While doing so, position of holder base surface is determined at every measurement point. EFFECT: higher measurement results. 5 cl, 1 dwg
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Authors
Dates
1997-11-27—Published
1996-06-06—Filed