FIELD: measurement technology. SUBSTANCE: information signal proportional to sensor capacitance variation and consequently to thickness of object being measured placed in clearance between sensor electrodes is measured, and thickness of object being measured is determined by calibration function. EFFECT: higher measurement results. 5 cl, 1 dwg
Title | Year | Author | Number |
---|---|---|---|
DEVICE AND TECHNIQUE FOR MEASURING SURFACE RESISTANCE OF SEMICONDUCTOR PLATES | 1996 |
|
RU2121732C1 |
DEVICE AND METHOD DESIGNED TO MEASURE GEOMETRICAL DIMENSIONS AND WARPING OF PLATES | 1996 |
|
RU2097746C1 |
INFORMATION-MEASURING SYSTEM FOR MONITORING THICKNESS AND MASS OF DIELECTRIC FLAT PRODUCTS | 2018 |
|
RU2701783C2 |
DEVICE FOR LUMBER HUMIDITY REMOTE CONTROL | 2006 |
|
RU2333481C1 |
ELECTRIC CAPACITY CONVERTER FOR CAPACITANCE SENSOR | 2019 |
|
RU2724299C1 |
CALIBRATION STANDARD FOR PROFILE METERS AND SCANNING PROBE MICROSCOPES | 2013 |
|
RU2538029C1 |
ELECTROSTATIC SENSOR FOR CONTROLLING A MOVABLE THIN OBJECT | 2020 |
|
RU2723971C1 |
PRESSURE OR FORCE MEASUREMENT DEVICE | 2010 |
|
RU2427811C1 |
CALIBRATION STANDARD FOR PROFILE METERS AND SCANNING PROBE MICROSCOPES | 2013 |
|
RU2538024C1 |
METHOD OF TEMPERATURE CORRECTION OF TRANSFER FUNCTION OF PHYSICAL QUANTITY DETECTOR | 2003 |
|
RU2247325C2 |
Authors
Dates
1998-03-20—Published
1996-06-14—Filed