PERIODIC STRUCTURE OF DRIVE-COUPLED THIN-FILM MIRRORS FOR OPTICAL PROJECTION SYSTEMS AND ITS MANUFACTURING PROCESS Russian patent published in 1999 - IPC

Abstract RU 2129759 C1

FIELD: projection systems. SUBSTANCE: periodic structure has active matrix, M x N pairs of working structures, structure of M x N mirrors, and structure of M x N pairs of supporting members. Each flexible member has far and near ends; the latter includes first and second projecting sections both spaced apart through depression; far end has projection. Projection of each flexible member enters depression of next one in periodic structure. Each active structure is located on first and second projecting sections on every flexible member, respectively; each working structure includes shift electrode, alarm electrode, and shift- inducing layer in-between. Each mirror is formed on top of flexible member. Each pair of supporting members is used to hold each flexible member in position. Each pair of working structures is deformed in response to electric signal. First and second projecting sections mounting working structures on flexible member are tilted while remaining portion of flexible member and mirror formed on it remain planar so that all mirrors reflect light beams. EFFECT: reduced structure efficiency. 22 cl, 16 dwg

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RU 2 129 759 C1

Authors

Dzheong Beom Dzhi

Eng Ki Min

Dates

1999-04-27Published

1995-03-02Filed