MATRIX OF THIN-FILMED EXCITABLE MIRRORS AND METHOD FOR ITS MANUFACTURE Russian patent published in 2000 - IPC

Abstract RU 2156487 C2

FIELD: optical projection systems. SUBSTANCE: the matrix has an active matrix consisting of a substrate, matrix of transistors and a matrix of lead-outs, and a matrix of exciting structures, each representing a bimorphous structure and having exciting and light-reflecting components. Each exciting component is made of several layers comprising thin-filmed electrodes and electroshiftable elements made of material characterized by the fact that it is crystallographically asymmetric, doesn't display hysteresis, and is formed at a temperature within 200 to 300 C. The method for manufacture of such a matrix consists in successive application of thin-filmed layers of the respective materials, including the temporary layers, for production of the respective profile of each layer and formation of matrix. EFFECT: excluded high-temperature process from manufacture of matrix, thus reduced cost. 14 cl, 20 dwg

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RU 2 156 487 C2

Authors

Jong Ki Min

Dates

2000-09-20Published

1995-11-22Filed