FIELD: optics. SUBSTANCE: matrix of M x N thin-film controlled mirrors has active matrix, insulating layer, layer terminating etching and matrix of M x N reduced structures. Each of reduced structures has lug on remote end and etching hole passing through structure and carries first thin-film electrode displaced under action of electric field, second thin-film electrode, elastic element and strap. Horizontal groove, lug and etching hole are formed to raise optical efficiency of each thin-film controlled mirror, to remove flushing water and to facilitate removal of thin- film temporary layer. EFFECT: raised optical efficiency. 17 cl, 26 dwg
