FIELD: optics. SUBSTANCE: proposed matrix has M x N thin- film actuated mirrors used in optical projection system. Each thin-film structure includes one thin-film layer of material inducing movement and two electrodes. Electrodes are positioned correspondingly on upper and lower surfaces of thin-film layer inducing movement. Matrix has M x N supporting elements. Each supporting element is used to fix proper structure. Matrix of M x N mirrors is intended for reflection of light beams. Each mirror is located on upper surface of corresponding structure. Electric field is applied to thin-film layer of material inducing movement placed between pair of electrodes in proper structure. With this deformation is induced which in its turn deforms mirror located on upper surface of material. EFFECT: development of process of manufacture of actuated mirror matrix that ensures high repetition and reliability by usage of thin-film technology. 33 cl, 19 dwg
